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Validation(2) in CCP/GEC reactor
Computational conditions
| Model |
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- Reference : Shahid Rauf and Mark J. Kushner,"Argon metastable densities in radio frequency Ar,Ar/O2 and Ar/CF4 electrical discharges",
Journal of Applied Physics, Vol.82,No.6,1997
Comparison with reference(1) -->
| Ar(+)Ionization rate and electron density |
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Comparison with reference(2)
| Plasma potential and electron temperature |
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Comparison with reference(3)
| Ar(+)Ionization rate and electron density |
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Comparison with reference(4)
| Ar(4s)Density（Closeup） |
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Comparison with reference(5)
| Ar(4s)distribution on electrode edge |
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