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Description of method
Input
Output
Examples
Validation(1) in CCP/GEC reactor
Validation(2) in CCP/GEC reactor
SF
6
ICP/Etching reactor
Cl
2
ICP/Etching reactor
C
2
H
2
ICP/CVD reactor
Discharge in PDP cell
Example
Discharge in PDP cell
Discharge in PDP cell
Computational conditions
Model
Results(Animation)
Electron density(1100kb)
Ionization rate(1109kb)
Excited Ar source rate(1112kb)
Electron temperature(1107kb)
Plasma potential(1139kb)
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