Validation(1) in CCP/GEC reactor

Computational conditions

Model

• Reference : D. P. Lymberopoulos and D. J. Economou,"Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell", Journal of Research of the National Institute of Standards and Technology, Vol.100, No.4, 1995

Comparison(1)

Result(Electron density)

Electron density at each pressure

Result(Ionization rate)

Ionization rate at each pressure

Comparison with reference(1)

Electron density on radial direction

Comparison(2)

Result(Electron density)

Electron density at each voltage

Result(Ionization rate)

Ionization rate

Comparison with reference(2)

Electron density on rasial direction