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Two dimensional feature profile simulation module FPSM2D (Feature Profile Simulation Module-2D; FPSM2D) is a module
to compute time-dependent feature profiles of substrate or deposited film using various physical/chemical reactions
on surface by particle Monte Carlo method.
Description of method
FPSM2D computes the feature profiles considering occupancy ratio of solid layer, surface coverage ratio by cell model
using particle Monte Carlo method. Incident angle calculating from gradient of solid layer occupancy ratio is applied
to probability of specular reflection and calculation of reaction probability. There are no restriction regarding the number
of species, reactions, complex sites and polymers.
Input
- Basically objects are defined by two dimensional rectangular mesh but initial profiles are able to define by arbitrary
shapes.
- The information of incident partciles(particle fluxes,energy and/or angular distribution functions) use whether the output
from othe PEGASUS modules or input data of specification of FPSM2D by user.
Output
- Feature profile of deposited layer and substrate (solid layer occupancy ratio)
- density and velocity spatial distributions of production gases after reactions
- Backflow fluxes to gas-phase, loss probability of inflow particles
Examples
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