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Example
  • Multyi layer film PVD

Multi layer film PVD

Computational conditions

  • The energy and angular distribution of inflow partciles to be adsorbed are 10 [eV] and cos(theta)^4, respectively.
  • The number of inflow species is three.
  • The number of inflow simulated particles is 5M for each species.

Results

  • Cpu timeFIntel Xeon 3.8GHz, 150[s]
Incident angular distribution Film thickness(T=200[s])


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