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Three dimensional feature profile simulation module FPSM3D (Feature Profile Simulation Module-3D; FPSM3D) is a module
to compute time-dependent feature profiles of substrate or deposited film using various physical/chemical reactions
on surface by particle Monte Carlo method.
Description of method
FPSM3D computes the feature profiles considering occupancy ratio of solid layer, surface coverage ratio by cell model
using particle Monte Carlo method. Incident angle calculating from gradient of solid layer occupancy ratio is applied
to probability of specular reflection and calculation of reaction probability. There are no restriction regarding the number
of species, reactions, complex sites and polymers.
Input
- Basically objects are defined by three dimensional rectilinear mesh but initial profiles are able to define by holes
or cylinders.
- The information of incident partciles(particle fluxes,energy and/or angular distribution functions) is given by user.
Output
- Feature profile of deposited layer and substrate (solid layer occupancy ratio)
- Backflow fluxes to gas-phase, loss probability of inflow particles
Examples
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