MSSM(Magneto-Static Simulation Module) computes spatial distribution of magnetic flux density by permanent magnet or magnetic coils .

Description of method

MSSM is a module to compute magnetic flux density by (A-phi) method for magneto-static equation based on Maxwell equation. Method of Discretization is Finite Element Method. The result will be used in plasma simulation module, PIC-MCCM or PHM. MSSM computes the magnetic flux density in two-dimensional Cartesian or cylindrical (axial symmetry model) coordinates. MSSM has been developed in collaboration with mu-TEC Co.,LTD.

Input data

• Specify computational domain, shape of chamber, permanent magnets, magnetic coils and magnetic yokes defined by two-dimensional rectangular mesh system in Cartesian or cylindrical (axial symmetry model) coordinates.
• Specify magnetic characteristics, residual magnetic flux density (Br) and coercive force　(bHc) for permanent magnets.
• Specify coil current for each magnetic coil.
• Magnetic characteristic data of yoke, S17C, is defined by internal database through PEGASUS/GUIM.

Output data

• Spatial distributions of magnetic flux density ( by vector map and contour map).
• Line of magnetic force

Example

• Magneto-static simulation in magnetron sputtering reactor.
• Magneto-static simulation by magnetic coils.