PEGASUS（Plasma Enhanced materials processing and rarefied GAS dynamics Unified Simulation tools）is a powerful supporting simulator for semiconductor manufacturing, plasma material processing and vacuum technology.

In behalf of efficiency improvement and reduction of costs concerning experiments and trials for

• Design, development, improvement of reactors or chambers
• Development, manufacturing of materials or electronic devices
• Forecasting, development, improvement of process technologies

We develop/distribute/support/customize this simulator, PEGASUS, responding various needs of many users.

Composition of products

PEGASUS is a generic name of software consists of many modules. PEGASUS is classified into three major module groups. THree major module groups mean two- or three-dimensional gas-phase simulator, surface science simulator and two- or three-dimensional feature profile simulator. Gas-phase simulator computes the spatial profile such as density, temperature and flow velocity of neutral gas and/or ionized gas in a chamber or a reactor. Surface science simulator computes a state of surface of a target. Feature profile simulator computes feature profile of surface of a substrate.

Each module is able to run not only by itself but also by combining with the other module. In other words, these modules in PEGASUS have been designed to able to give the maximum effect by minimum investment by combining with or selection of modules correspond to needs of users.

Two-dimensional gas-phase simulators

The modules in the simulator compute the spatial profile of plasma, electron and ions, and/or neutral particles, fed gas and/or radicals generated by neutral-plasma reactions, in a reactor or a chamber.

PHM ( Plasma Hybrid Module )

This module computes spatial distributions of densitiy of charged particles and electric field etc., in a reactor with using a hybrid simulation model.

PIC-MCCM ( Particle In Cell with Monte Carlo Collision Module )

This module computes spatial distributions of densitiy of charged particles and electric field etc., in a reactor with using a particle-in-cell model and a Monte Carlo collision model.

NMEM ( Neutral Momentum Equation Module )

This module computes spatial distribution of density and pressure of each neutral species by a continuum fluid model.

DSMCM ( Direct Simulation Monte Carlo Module )

DSMCM is a two-dimensional DSMC software.

MSSM ( Magneto Static Simulation Module )

MSSM computes spatial distribution of magnetic flux density by permanent magnet or magnetic coils .

3D gas-phase simulators

RGS3D ( 3D Rarefiled Gas dynamics Simulation software )

RGS3D computes the spatial distribution of density, temperature and pressure of neutral particles in arbitrary three dimensional shape.

PIC-MCCM 3D

3D version of PIC-MCCM.

MSSM 3D

3D version of MSSM.

Surface science simulators

The modules in the simulator compute a state of surface of a target or a substrate.

SMCSM ( Sheath Mnte Carlo Simulation Module )

This module computes incident energy distribution and angular distribution onto a target or a substrate by tracing the motion of electrons and ions in a sheath depend on time.

SASAMAL ( Simulation of Atomic Scattering in Amorphous MAterial based on Liquid model )

SASAMAL is a simulation software for high dose ion implantation and sputtering based on a binary collision approximation.

SPUTSM ( SPUTtering Simulation Module )

SPUTSM is a module to compute sputtered particle flux, angular distribution and energy distribution of sputtered particles by using SASAMAL and the result such as incident ion flux, ion energy and incident angle of ions from PIC-MCCM.

Feature profile simulators

The following modules compute feature profiles of surface of a substrate or a deposited thin film in PVD, plasma CVD or dry etching processes.

FPSM2D ( Fature Profile Simulation Module-2D )

FPSM2D is a module to compute time-dependent feature profiles of substrate or deposited film using various physical/chemical reactions on surface by particle Monte Carlo method.

FPSM3D ( Fature Profile Simulation Module-3D )

This is 3D version of FPSM2D.

Graphical User Interface module

GUIM ( Graphical User Interface Module )

GUIM is a graphical user interface for control of execution of all of modules, for definition of region, mesh generation and definition of boundary conditions, for graphical output of various quantities. All of modules in PEGASUS are able to execute via GUIM.