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PEGASUS
Plasma Enhanced materials processing
and rarefied GAS dynamics Unified Simulation tools
PEGASUS is software to simulate plasma behavior, and to simulate rarefied gas dynamics.
The following simulation can be done by combining and using each module of PEGASUS.
- Plasma and sputtering particles in magnetron sputtering equipments.
- Plasma and Fed gas, radicals, other dissociative neutrals in CCP/ICP reactors.
- Micro plasma
- Evaporating particles in vacuum evaporation equipments.
- Rarefied gas dynamics in various vacuum chambers and vacuum pumps.
- Ion implantation
- Feature profile in micro fabrications.
Vacuum technology and technology of plasma processing has been applied
in various industry world such as semiconductor, flat panel display, optics,
electric, electronics.
For many manufacturing engineers and R&D engineers in these fields, we develop
and support useful simulation software, PEGASUS.
New information
- June 12th, 2015 Download page is updated.
- Dec. 12th, 2014 Download page is updated.
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