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PHM(Plasma Hybrid Module) computes spatial distribution of density of charged
particles and electric field etc., in a reactor by hybrid model.
Description of method
PHM is a module to compute plasma parameters of non-equilibrium and low
temperature plasma in various semiconductor manufacturing reactors, magnetron
sputtering reactors and thin-film manufacturing reactors. PHM consists
of the following five modules.
- EMM(Electro-Magnetic Module)
- EMM solves for E theta, complex amplitude of azimuthal component of the
electric field, and computes power absorption in ICP reactors.
- EMCSM(Electron Monte Carlo Simulation Module)
- his module estimates EEDF, electron swarm parameters, momentum transfer
collision frequency and source rates using electron impact collision cross
sections.
- DDEM(Drift Diffusion Equation Module)
- DDEM is a module to compute density distributions of each charged particles
using the continuity equation by drift-diffusion model of charged particles
using output values from above EMCSM under no magnetic field.
- CPMEM(Charged Particles Momentum Equation Module)
- CPMEM is a module to compute density and velocity distributions of each
charged particles by the momentum equation of charged particles under magneto-static
field. Also CPMEM uses some output values from EMSCM.
- DDEM or CPMEM will be used whether under no magnetic field or undermagneto-static
filed, respectively.
- PEM(Poisson Equation Module)
- PEM solves a Poisson equation by semi-implicit method using space charge
and specified boundary conditions. This module should be coupled with DDEM
or CPMEM.
PHM calls above 1., 2., 3. or 4. and 5. alternately to compute plasma parameters
in various CCP or ICP plasma reactors in two-dimensional Cartesian or cylindrical
(axial symmetry model) coordinates.
Input data
- Specify computational domain, RF and DC electrodes, insulators and/or ICP
coils defined by two-dimensional rectangular mesh system in Cartesian or
cylindrical (axial symmetry model) coordinates.
- Specify species of fed or background gas
- Select the reaction (elastic, ionization, excitation, dissociation and
recombination etc.)
- between particles defined by internal database through PEGASUS/GUIM
- Specify file name containing magnetic flux density
Output data
- Spatial distributions of density, flux for each charged particles.
- Spatial distributions of source rates of charged particles, radical and
excited neutral particles.
- Particle flux of each charged particles on the targets and walls.
- Spatial distributions of electric potential and electric field.
- Electron energy distribution function .
- Power deposition and E Theta distribution when ICP coils exist.
Example
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