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  • C2H2 ICP/CVD reactor

C2H2 ICP/CVD reactor

Computational condtions

Model
Model

Results

Electron density Electron density Plasma potential
Electron density Electron temperature Plasma potential
EEDF(Electron energy distribution function) Power deposition Azimuthal electric field
Electron energy distribution function Power deposition Azimuthal electric field
C2H2(+)Ion density C2H(+)Ion density CH2(+)Ion density
C2H2(+)Ion density C2H(+)Ion density CH2(+)Ion density
CH(+)Ion density C(+)Ion density H2(+)Ion density
CH(+)Ion density C(+)Ion density H2(+)Ion density
H(+)Ion density C2H2density Total pressure
H(+)Ion density C2H2density Total pressure

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