Comparison experiment and simulation for film thickness in vacuum evaporation equipment

Compuational conditions

1. Evaporation atom : Au
2. Background Ar gas pressure : 1.8E-3, 0.05, 0.1, 0.415, 0.867 [Pa]

Model	Observed point

Comparison with experimental result

1. Dependency of Ar gas pressure

Comparison with experiment	DIstribution of incident speed

Output

1. Density,Temperature,Pressure and velocity spatial distribution and adsorbed flux on the substrate