The following simulation can be done by combining and using each module of PEGASUS.
Plasma and sputtering particles in magnetron sputtering equipments
Ion beam path calculation.
Evaporating particles in vacuum evaporation equipments
Rarefied gas dynamics in various vacuum chambers and vacuum pumps
Feature profile in micro fabrications.
July 12th, 2017
User's Plaza is updated. GUIM operatability is improved.
July 29th, 2016
User's Plaza is updated. Parallel computation functions of PEGASUS are enhanced.
March 3rd, 2016
In parallel PIC-MCCM, a problem for surface charge up calculation is fixed. User's Plaza is updated.
User's Plaza is updated.