Ion beam path calculation

Computational conditions

Ion beam path calculation
  • Ion acceleration voltage : 20kV
  • Ion current density : 20 micro A/cm2
  • Beam diameter : 20mm
  • Distance between electrodes : 40mm
  • Voltage difference betwebb electrodes : 1kV, 5kV, 10kV, 20kV
  • Pressure : 9.6e-3 Pa

Result

  • 5kV

    5kV

  • 10kV

    10kV

  • 20kV

    20kV

  • 1kV

    1kV