Multi layer film PVD
- The energy and angular distribution of inflow partciles to be adsorbed are 10[eV] and cos(theta)^4, respectively.
- The number of inflow species is three.
- The number of inflow simulated particles is 5M for each species.
Incident angular distribution
Film thickness (T=200[s])
CPU time：Intel Xeon 3.8GHz, about 150[s]