Multi layer film PVD

Computational conditions

  • The energy and angular distribution of inflow partciles to be adsorbed are 10[eV] and cos(theta)^4, respectively.
  • The number of inflow species is three.
  • The number of inflow simulated particles is 5M for each species.


  • Incident angular distribution

    Incident angular distribution

  • Film thickness (T=200[s])

    Film thickness (T=200[s])

CPU timeļ¼šIntel Xeon 3.8GHz, about 150[s]