Sheath Monte Carlo Simulation Module

Description

SMCSM computes energy and angular distribution of electrons and ions reached to the bottom of sheath from sheath edge of bulk plasma through sheath. Description of computational procedure is as follows.

• At first, electric field depending on time within one RF period in a sheath should be computed by using Lieberman’s sheath model or using PEGASUS/PHM.
• Second, charged particles, electrons and ions, are flow-in from sheath boundary. The velocity distribution of flow-in particles should be whether Maxwell-Boltzmann distribution or Bohm velocity plus Maxwell-Boltzmann distribution. Time of incident from sheath boundary will be decided by using uniform random number within a RF period.
• Finally, motion of charged particles in time varying electric field will be traced until reached to the bottom of a sheath, surface of a target. The collision in the sheath should be neglected. Statistical sampling for energy and incident angle of charged particles reached to the bottom of sheath, surface of target will be done.

Input data

• Specify electric charge and mass for each incident charged particles.
• Specify following parameters for a shape of sheath if Lieberman’s sheath model would be used.
  • Electron density of sheath edge
  • Electron temperature
  • Frequency of RF electrode
  • Current
  • If PEGASUS/PHM would be called previously, above parameters are free.
• Then result-ant file concerning time dependent electric field from PHM should be required.

Output data

• Energy distribution of charged particles onto the bottom of a sheath, surface of target
• Incident angle distribution of charged particles onto the bottom of a sheath, surface of target

Example

• SMCSM calculation example