Magneto Static Simulation Module
MSSM computes spatial distribution of magnetic flux density
by permanent magnet or magnetic coils .
Description
MSSM is a module to compute magnetic flux density by (A-phi) method for magneto-static equation based on Maxwell equation. Method of Discretization is Finite Element Method. The result will be used in plasma simulation module, PIC-MCCM or PHM. MSSM computes the magnetic flux density in two-dimensional Cartesian or cylindrical (axial symmetry model) coordinates. MSSM has been developed in collaboration with mu-TEC Co.,LTD.Input data
- Specify computational domain, shape of chamber, permanent magnets, magnetic coils and magnetic yokes defined by two-dimensional rectangular mesh system in Cartesian or cylindrical (axial symmetry model) coordinates.
- Specify magnetic characteristics, residual magnetic flux density (Br) and coercive force　(bHc) for permanent magnets.
- Specify coil current for each magnetic coil.
- Magnetic characteristic data of yoke, S17C, is defined by internal database through PEGASUS/GUIM.
Output data
- Spatial distributions of magnetic flux density ( by vector map and contour map).
- Line of magnetic force
Example
- Unbalanced magnetron sputtering system
- Planar magnetron sputtering sysmte
- Coaxial cylinder magnetron
- Analysis of a Magnetron Sputtering Equipment
- Self-ionized sputtering
- Plasma parameter analysis in a RF magnetron sputtering equipment
- Magnetic field analysis in a device having magnetic field coils
- Magnetic field analysis in a magnetron sputtering device