SASAMAL calculation example

Computational conditions

Dr. Miyagawa obtained good results in the field of surface modification by high-energy from several tens Kev to few Mev and high-dose ion implantation by using SASAMAL. But here, some examples for comparably low incident ion energy, several hundreds eV, are presented for the subject of PEGASUS.

Result

  • Sputtering yields for incident Ar, H and He ion onto Ni target

    Sputtering yields for incident Ar, H and He ion onto Ni target