PIC-MCCM and DSMCM coupling calculation

Computational conditions

  • Cylindrical coordinates
  • Electrode Vrf=200[V], 13.56[MHz]
  • H_2 250[mTorr], SiH4 20[mTorr]

Result

  • Electron density

    Electron density

  • H2 density

    H2 density

  • H2+ density

    H2+ density

  • H2* density

    H2* density

  • SiH3 density

    SiH3 density

  • SiH3- density

    SiH3- density

  • SiH3+ density

    SiH3+ density

  • SiH2 density

    SiH2 density

  • SiH4 density

    SiH4 density

  • Electric potential

    Electric potential