C2H2 ICP/CVD reactor

Computational conditions

C2H2 ICP/CVD reactor C2H2 gas flow and plasma parameters are calculated. This is a PHM and DSMCM coupling caluclation example.

Result

  • Electron density

    Electron density

  • Electron temperature

    Electron temperature

  • Electric potential

    Electric potential

  • EEDF (electron energy distribution function)

    EEDF (electron energy distribution function)

  • Power deposition

    Power deposition

  • Azimuthal electric field

    Azimuthal electric field

  • C2H2(+) density

    C2H2(+) density

  • C(+) density

    C(+) density

  • CH2(+) density

    CH2(+) density

  • CH(+) density

    CH(+) density

  • C(+) density

    C(+) density

  • H2(+) density

    H2(+) density

  • H(+) density

    H(+) density

  • C2H2 density

    C2H2 density

  • Total pressure

    Total pressure